Microfluidic probe: a new tool for integrating microfluidic environments and electronic wafer-probing

Abstract

We demonstrate a new tool for integrating microfluidic channels with commonly used electronic probing techniques. The “microfluidic probe” allows rapid and repeatable fluidic and electronic addressing of small die sites on a variety of substrate types without the need for permanent modification or dicing of the device wafers. We also use the probe to demonstrate locally patterned chemical modification of a substrate. The probes are easily fabricated using standard soft-lithography and basic machining making this a widely accessible technique for electronics and fluidics researchers.