- Article type
- 29 Jun 2009
- 08 Oct 2009
- First published
- 01 Dec 2009
etching of structures with straight facets and adjustable taper into glass substrates
N. Pekas, Q. Zhang, M. Nannini and D. Juncker, Lab Chip, 2010, 10, 494 DOI: 10.1039/B912770D
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