Diffusion of water into SU-8 microcantilevers
Abstract
We present a method to monitor the diffusion of liquid molecules in
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* Corresponding authors
a
Max-Planck Institute for Polymer Research, Ackermannweg 10, 55128 Mainz, Germany
E-mail:
auhammer@mpip-mainz.mpg.de, bonaccur@mpip-mainz.mpg.de
Fax: +49 6131 379310
Tel: +49 6131 379112
b Center of Smart Interfaces, Technical University Darmstadt, 64289 Darmstadt, Germany
c Department of Micro- and Nanotechnology, Technical University of Denmark, Building 345 East, 2800 Lyngby, Denmark
We present a method to monitor the diffusion of liquid molecules in
C. Liu, Y. Liu, M. Sokuler, D. Fell, S. Keller, A. Boisen, H. Butt, G. K. Auernhammer and E. Bonaccurso, Phys. Chem. Chem. Phys., 2010, 12, 10577 DOI: 10.1039/C002478C
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