The role of zinc dopant and the temperature effect on the controlled growth of InNnanorods in metal–organic chemical vapor deposition system

Abstract

Vertically well-aligned InN nanorods have been synthesized successfully by introducing diethylzinc (DEZn) into metal–organic chemical vapor deposition system. X-Ray diffraction and transmission electron microscopy measurements show that InN nanorods are single-crystalline and Zn-doped. In-depth studies indicate that DEZn inhibits the InN growth along m-plane and further leads to the self-formation indium droplets acting as catalyst. The whole growth process of InN nanorods is a combined result of the restriction effect from DEZn and catalytic effect from indium droplets. Also, the temperature effect on the growth has been studied intensively. Our research on the controlled growth of high-quality InN nanorods is very important for InN-based optoelectronic and electronic nano-devices.