A monolithic photonic microcantilever device for in situ monitoring of volatile compounds†
Abstract
A monolithic photonic microcantilever device is presented comprising silicon light sources and detectors self-aligned to suspended
* Corresponding authors
a
Institute of Microelectronics, NCSR “Demokritos”, Athens, Greece
E-mail:
misiakos@imel.demokritos.gr
Fax: +30 2106511723
Tel: +30 2106503226
b Istituto di Fotonica e Nanotecnologie (IFN), CNR, Roma, Italy
A monolithic photonic microcantilever device is presented comprising silicon light sources and detectors self-aligned to suspended
K. Misiakos, I. Raptis, A. Gerardino, H. Contopanagos and M. Kitsara, Lab Chip, 2009, 9, 1261 DOI: 10.1039/B818989G
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