Atomic layer deposition of lithium containing thin films
Abstract
Five different lithium containing compounds, all representing different chemical systems, were studied in order to deposit lithium containing films by
* Corresponding authors
a Beneq Oy, P.O. Box 262, Vantaa, Finland
b Laboratory of Inorganic Chemistry, Department of Chemistry, Helsinki University of Technology, P.O. Box 6100, Finland
c
Centre for Materials Science and Nanotechnology, Department of Chemistry, University of Oslo, P.O. Box 1033, Blindern, N-0315 Oslo, Norway
E-mail:
titta.aaltonen@smn.uio.no
Fax: +47 2285 5565
Tel: +47 2285 8639
d Department of Physics, University of Jyväskylä, P.O. Box 35, Jyväskylä, Finland
Five different lithium containing compounds, all representing different chemical systems, were studied in order to deposit lithium containing films by
M. Putkonen, T. Aaltonen, M. Alnes, T. Sajavaara, O. Nilsen and H. Fjellvåg, J. Mater. Chem., 2009, 19, 8767 DOI: 10.1039/B913466B
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