Issue 24, 2009

A UV curable resin with reworkable properties: application to imprint lithography

Abstract

Difunctional methacrylate monomers having a hemiacetal ester moiety in the molecule were used to prepare a plastic replica of an original mold for imprint lithography. UV curing of the monomers was performed with 365 nm light and photo-induced degradation of the cured resins was performed using 254 nm light.

Graphical abstract: A UV curable resin with reworkable properties: application to imprint lithography

Supplementary files

Article information

Article type
Communication
Submitted
13 Mar 2009
Accepted
11 May 2009
First published
20 May 2009

J. Mater. Chem., 2009,19, 4085-4087

A UV curable resin with reworkable properties: application to imprint lithography

D. Matsukawa, H. Wakayama, K. Mitsukura, H. Okamura, Y. Hirai and M. Shirai, J. Mater. Chem., 2009, 19, 4085 DOI: 10.1039/B905188K

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