A UV curable resin with reworkable properties: application to imprint lithography†
Abstract
Difunctional methacrylate monomers having a hemiacetal ester moiety in the molecule were used to prepare a plastic replica of an original mold for imprint
* Corresponding authors
a
Department of Applied Chemistry, Osaka Prefecture University, 1-1 Gakuen-cho, Nakaku, Sakai, Osaka 599-8531, Japan
E-mail:
mshirai@chem.osakafu-u.ac.jp
Fax: +81-72-254-9291
Tel: +81-72-254-9291
b Department of Physics and Electronics, Osaka Prefecture University, 1-1 Gakuen-cho, Nakaku, Sakai, Osaka 599-8531, Japan
Difunctional methacrylate monomers having a hemiacetal ester moiety in the molecule were used to prepare a plastic replica of an original mold for imprint
D. Matsukawa, H. Wakayama, K. Mitsukura, H. Okamura, Y. Hirai and M. Shirai, J. Mater. Chem., 2009, 19, 4085 DOI: 10.1039/B905188K
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