Issue 8, 2009
From the journal:

Journal of Analytical Atomic Spectrometry

Determination of the efficiency of an energy dispersive X-ray spectrometer up to 50 keV with a SEM

Vanessa Rackwitz,*a   Alexander Warrikhoff,b   Ulrich Panneac  and  Vasile-Dan Hodoroabaa  

* Corresponding authors

a BAM Bundesanstalt für Materialforschung und -prüfung, Berlin, Germany
E-mail: vanessa.rackwitz@bam.de
Fax: +49 30 8104 1827
Tel: +49 30 8104 3680

b rtw Röntgen-Technik Dr. Warrikhoff GmbH & Co. KG, Neuenhagen b. Berlin, Germany

c Humboldt Universitaet zu Berlin, Chemistry Department, Brook-Taylor-Strasse 2, Berlin, Germany

Abstract

Both electron and polychromatic photon excitations (micro-focus X-ray source) at a scanning electron microscope (SEM) are used to determine the efficiency of an energy dispersive X-ray spectrometer up to 50 keV by means of a calibrated X-ray spectrometer and reference materials (RM) specially selected for this purpose.

Graphical abstract: Determination of the efficiency of an energy dispersive X-ray spectrometer up to 50 keV with a SEM

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Article information

DOI
https://doi.org/10.1039/B907815K
Article type
Communication
Submitted
20 Apr 2009
Accepted
01 Jun 2009
First published
08 Jun 2009

J. Anal. At. Spectrom., 2009,24, 1034-1036

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Determination of the efficiency of an energy dispersive X-ray spectrometer up to 50 keV with a SEM

V. Rackwitz, A. Warrikhoff, U. Panne and V. Hodoroaba, J. Anal. At. Spectrom., 2009, 24, 1034 DOI: 10.1039/B907815K

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