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Issue 46, 2009
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Ultra-thin microporous–mesoporous metal oxide films prepared by molecular layer deposition (MLD)

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Abstract

Porous aluminium oxide films with precisely controlled thickness down to several angstroms are deposited on particle surfaces from dense aluminium alkoxide hybrid polymer films by molecular layer deposition. Porous structures are obtained by either mild water etching at room temperature or calcination in air at elevated temperatures.

Graphical abstract: Ultra-thin microporous–mesoporous metal oxide films prepared by molecular layer deposition (MLD)

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Article information


Submitted
17 Jun 2009
Accepted
28 Sep 2009
First published
15 Oct 2009

Chem. Commun., 2009, 7140-7142
Article type
Communication

Ultra-thin microporous–mesoporous metal oxide films prepared by molecular layer deposition (MLD)

X. Liang, M. Yu, J. Li, Y. Jiang and A. W. Weimer, Chem. Commun., 2009, 7140
DOI: 10.1039/B911888H

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