Fabrication and optical properties of periodical structures based on a water-developable and tunable La0.7Sr0.3MnO3 resist

Abstract

We have fabricated a unique periodic structure with different optical properties in the visible range using a water-developable La_0.7Sr_0.3MnO₃ electron beam resist. The La_0.7Sr_0.3MnO₃ resist can be developed under a nontoxic and environmentally friendly manner using pure water. Additionally, the resist is capable of exhibiting both positive and negative resist behavior depending on the electron beam dosage. Thus, these special characteristics were used to fabricate and tune periodic structure thin films having controlled optical reflectance properties in the wavelength range of 300 nm to 800 nm with one fixed design electron beam pattern (i.e. without changing the geometries and lattice constants of the periodical structures) by simply changing the electron beam dosage only.