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Issue 5, 2007
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TiO2 patterning using electro-hydrodynamic lithography

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An increasing number of technologies require the fabrication of micro- and nanostructures over large areas. Soft lithographic methods are gaining in popularity for the manufacture of low-cost micrometre and sub-micrometre structures. Increasingly, these methods developed to structure organic resists can also be used to pattern inorganic materials. Here we introduce a simple lithographic technique that is able to pattern ceramic TiO2 micro- and nanostructures with high fidelity. Our method makes use of an electrohydrodynamic (EHD) film instability that is controlled by a laterally modulated electric field. A spin-coated film of a stabilized metal alkoxide precursor material was patterned using EHD lithography followed by a heat treatment at 400 °C to yield crystalline TiO2 micropatterns. Our technique is rather general and can be extended to a number of single- and multicomponent oxide systems.

Graphical abstract: TiO2 patterning using electro-hydrodynamic lithography

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Publication details

The article was received on 13 Nov 2006, accepted on 19 Dec 2006 and first published on 23 Jan 2007

Article type: Paper
DOI: 10.1039/B616538A
Citation: Soft Matter, 2007,3, 554-557
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    TiO2 patterning using electro-hydrodynamic lithography

    N. E. Voicu, M. S. M. Saifullah, K. R. V. Subramanian, M. E. Welland and U. Steiner, Soft Matter, 2007, 3, 554
    DOI: 10.1039/B616538A

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