Issue 4, 2006

Chemical vapour deposition of titanium chalcogenides and pnictides and tungsten oxide thin films

Abstract

This perspective article focuses on the formation of titanium chalcogenides and pnictides and tungsten oxides by chemical vapour deposition. Attention is focused on the role of the precursor and on the different microstructures that can be produced under different conditions.

Graphical abstract: Chemical vapour deposition of titanium chalcogenides and pnictides and tungsten oxide thin films

Supplementary files

Article information

Article type
Perspective
Submitted
16 Sep 2005
Accepted
09 Jan 2006
First published
30 Jan 2006

New J. Chem., 2006,30, 505-514

Chemical vapour deposition of titanium chalcogenides and pnictides and tungsten oxide thin films

R. G. Palgrave and I. P. Parkin, New J. Chem., 2006, 30, 505 DOI: 10.1039/B513177D

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