Fabrication of suspended single-walled carbon nanotubesvia a direct lithographic route
Abstract
We report a fabrication method of suspended SWNTs between SiO2 pillars via a direct lithographic route using a simple mixture of
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* Corresponding authors
a
National Research Laboratory for Information Devices and Materials, Department of Materials Science and Engineering, Korea University, Anam-Dong 5-1, Sungbuk-Ku, Seoul, Korea
E-mail:
ykim97@korea.ac.kr
Tel: +82 2 3290 3281
b
Materials and Devices Research Center, Samsung Advanced Institute of Technology, Yong-In, Kyeongki-Do, Korea
E-mail:
wanjun@samsung.com
Fax: +82 31 280 9308
Tel: +82 31 280 9305
c School of Materials Science and Engineering, Seoul National University, Seoul, Korea
We report a fabrication method of suspended SWNTs between SiO2 pillars via a direct lithographic route using a simple mixture of
B. S. Oh, Y. Min, E. J. Bae, D. Kang, I. S. Jung, C. S. Hwang, Y. K. Kim and W. Park, J. Mater. Chem., 2006, 16, 174 DOI: 10.1039/B510742C
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