Issue 1, 2006

Round Robin exercise: Coated materials for glow discharge spectroscopy

Abstract

A Round Robin (RR) exercise on selected coated materials has been carried out with the aim of finding the optimal conditions for the analysis of nitride layers with GD-OES. Such pre-normative work is necessary for the evaluation of parallel development of the production of nitride layers as certified reference materials (CRMs). Two types of samples, Ti–N layer and V–N layer, respectively, with chemical compositions close to stoichiometry and a thickness of ∼3 μm, deposited on a steel substrate, have been provided to the RR participants. Additionally, another type of sample, a (100 nm CrNi/100 nm Cu) multilayer (ML) stack deposited on silicon wafer has also been included in the RR. This sample can be used as a CRM for checking GD spectrometer conditions and it has been proved helpful in further development of GDS instrumentation and methodology. The RR exercise has been performed in the frame of the EC Thematic Network on Glow Discharge Spectroscopy for Spectrochemical Analysis (‘GDS-Net’).

Graphical abstract: Round Robin exercise: Coated materials for glow discharge spectroscopy

Article information

Article type
Paper
Submitted
21 Sep 2005
Accepted
01 Nov 2005
First published
24 Nov 2005

J. Anal. At. Spectrom., 2006,21, 74-81

Round Robin exercise: Coated materials for glow discharge spectroscopy

V. Hodoroaba, V. Hoffmann, E. B. M. Steers, M. Griepentrog, A. Dück and U. Beck, J. Anal. At. Spectrom., 2006, 21, 74 DOI: 10.1039/B513426A

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