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Issue 5, 2004
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Surface micromachined electrostatically actuated micro peristaltic pump

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An electrostatically actuated micro peristaltic pump is reported. The micro pump is entirely surface micromachined using a multilayer parylene technology. Taking advantage of the multilayer technology, the micro pump design enables the pumped fluid to be isolated from the electric field. Electrostatic actuation of the parylene membrane using both DC and AC voltages was demonstrated and applied to fluid pumping based on a 3-phase peristaltic sequence. A maximum flow rate of 1.7 nL min−1 and an estimated pumping pressure of 1.6 kPa were achieved at 20 Hz phase frequency. A dynamic analysis was also performed with a lumped-parameter model for the peristaltic pump. The analysis results allow a quantitative understanding of the peristaltic pumping operation, and correctly predict the trends exhibited by the experimental data. The small footprint of the micro pump is well suited for large-scale integration of microfluidics. Moreover, because the same platform technology has also been used to fabricate other devices (e.g. valves, electrospray ionization nozzles, filters and flow sensors), the integration of these different devices can potentially lead to versatile and functional micro total analysis systems (μTAS).

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Publication details

The article was received on 15 Mar 2004, accepted on 08 Jun 2004 and first published on 14 Sep 2004

Article type: Paper
DOI: 10.1039/B403906H
Citation: Lab Chip, 2004,4, 495-501
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    Surface micromachined electrostatically actuated micro peristaltic pump

    J. Xie, J. Shih, Q. Lin, B. Yang and Y. Tai, Lab Chip, 2004, 4, 495
    DOI: 10.1039/B403906H

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