The analytical impact of power control in a radio frequency glow discharge optical emission plasma

Abstract

Direct current (dc) and radio frequency (rf) glow discharge power control requirements, and limitations are described. The differences between dc and rf power control are explored. The various difficulties faced with rf power regulation are listed and explained. In light of these challenges, the appropriate design goals for an rf glow discharge power supply and control system are outlined. The design and implementation of such a new rf design is then detailed. The ability of this new design to deal with the various rf difficulties is discussed. This design is evaluated and experimental evidence that it functions as anticipated is collected, presented, and discussed. This new rf power supply design is shown to have significant new capabilities.