MEMS technology in analytical chemistry
Abstract
Microelectromechanical systems promise to revolutionize nearly every product category by bringing together silicon-based microelectronics with micromachining technology, moving us closer towards the realization of complete systems-on-a-chip. Anil Deisingh talks us through the basics of MEMS technology and the growing role of these new ″micromachines″ in analytical chemistry applications.