Issue 8, 2002

Inorganic speciation in static SIMS: a comparative study between monatomic and polyatomic primary ions

Abstract

This paper addresses the use of static SIMS (S-SIMS) for the speciation of inorganic compounds. Specifically, the use of SF5+ and ReO4 polyatomic primary ions for the analysis of binary salts is compared to bombardment with Ga+. The features of the mass spectra are discussed with respect to the gain in secondary ion intensity and the increased production of molecule-specific adduct ions and structural fragments when using polyatomic instead of monatomic ion bombardment.

Article information

Article type
Paper
Submitted
03 Mar 2002
Accepted
05 Jun 2002
First published
25 Jun 2002

J. Anal. At. Spectrom., 2002,17, 753-758

Inorganic speciation in static SIMS: a comparative study between monatomic and polyatomic primary ions

R. Van Ham, L. Van Vaeck, A. Adriaens, F. Adams, B. Hodges and G. Groenewold, J. Anal. At. Spectrom., 2002, 17, 753 DOI: 10.1039/B202225G

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