Preparation of boron nitride thin films by microwave PECVD and their analytical characterisation
Abstract
Hexagonal
* Corresponding authors
a
Chemnitz University of Technology, Institute of Chemistry, Department of Physical Chemistry, D-09107 Chemnitz, Germany
E-mail:
thomas.thamm@chemie.tu-chemnitz.de
Hexagonal
T. Thamm, W. Baumann, D. Dietrich, N. Meyer, S. Stöckel and G. Marx, Phys. Chem. Chem. Phys., 2001, 3, 5150 DOI: 10.1039/B106220B
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