Abstract

The development of microsecond pulsed glow discharge atomic emission spectrometry (GD-AES) for quantitative depth profile analysis is described. The quantification method, which is based on sputtering rates, has been previously applied to depth analysis employing a dc glow discharge source. Optimal conditions of the glow discharge source, including voltage, pressure, pulse width and pulse frequency, are utilized in order to give the best depth resolution. Pulsed operation of the glow discharge affords the advantages of two additional parameters, pulse width and pulse frequency, which allow better control over the amount of sample being removed via cathodic sputtering. This allows thin layer samples to be analyzed that are very difficult using the dc source. Under the optimized parameters, thin coatings of varying depths of Cu deposited on steel were quantified. The quantitative method predicted Cu deposition depths in accord with the nominal depths.