Issue 3, 2000
From the journal:

Journal of Analytical Atomic Spectrometry

M. Eschwey,a   E. Pulvermacher,a   C. Benninghoffb  and  U. Telgheder*b  

* Corresponding authors

a Messer Griesheim GmbH, Worthstr. 170, Duisburg, Germany

b Gerhard-Mercator-University of Duisburg, Department of Instrumental Analytical Chemistry, Lotharstr. 1, Duisburg, Germany

Abstract

An analytical procedure is described for the determination of boron in dichlorosilane by means of ICP-AES. A modified sampling and gas introduction system allows on-line monitoring of the investigated gas. The calibration of the procedure was carried out by standard additions of gaseous diborane/argon [c(B2H6) = 10.4 µl l−1] and dichlorosilane. The detection limit was found to be 0.63 µg boron g−1 of dichlorosilane.

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Article information

DOI
https://doi.org/10.1039/A908634J
Article type
Paper
Submitted
29 Oct 1999
Accepted
06 Jan 2000
First published
07 Feb 2000

J. Anal. At. Spectrom., 2000,15, 277-279

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On-line monitoring of boron in dichlorosilane by means of inductively coupled plasma atomic emission spectrometry (ICP-AES)

M. Eschwey, E. Pulvermacher, C. Benninghoff and U. Telgheder, J. Anal. At. Spectrom., 2000, 15, 277 DOI: 10.1039/A908634J

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