Selection of internal standard for determination of boron and phosphorus by ICP-MS in silicon photovoltaic materials

Abstract

A single-chamber autoclave with a heating plate was used for the acid dissolution of quartz and metallic silicon. Analysis was performed by ICP-MS. Comparison of ⁶ Li, ⁷ Li, ¹¹⁵ In, ³⁵ Cl and ³⁷ Cl+ ³⁶ Ar ¹ H was carried out for selecting the best internal standard taking into account instrumental drift. The selection criteria are discussed. ³⁵ Cl was selected as the internal standard.