A comparison of lamp control parameters in both bulk and depth profile analysis by glow discharge optical emission spectroscopy

Abstract

The impact of the glow discharge lamp control parameters (voltage, current and pressure) on the quality of the multi-matrix calibration curves, bulk check standard results and quantitative depth profile analysis is investigated. The lack of current and voltage stability is shown to have a larger influence on the quality of these results than do similar changes in pressure. Lamp control modes that achieve both constant current and constant voltage at the expense of constant pressure are found to be best for both multi-matrix bulk analysis and quantitative depth profile analysis.