Issue 8, 1997

IR laser-induced decomposition of prop-2-enylsilane and ethynylsilane for chemical vapour deposition of Si/C phases

Abstract

IR multiphoton decomposition of prop-2-enylsilane affords a solid material consisting of an Si/C/H polymer and SiC, while that of ethenylsilane produces a solid material consisting almost exclusively of SiC.

Article information

Article type
Paper

J. Mater. Chem., 1997,7, 1415-1420

IR laser-induced decomposition of prop-2-enylsilane and ethynylsilane for chemical vapour deposition of Si/C phases

J. Pola, J. Vítek, Z. Bastl, M. Urbanová, J. Šubrt and R. Taylor, J. Mater. Chem., 1997, 7, 1415 DOI: 10.1039/A700370F

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