Issue 4, 1997
From the journal:

Journal of Materials Chemistry

Si/C phases from the IR laser-induced decomposition of 1,4-disilabutane

Elvira A. Volnina,   Jaroslav Kupčík,   Zdeněk Bastl,   Jan Šubrt,   Leonid E. Gusel’nikov  and  Josef Pola  

Abstract

CO 2 laser-induced decomposition of 1,4-disilabutane (DSB) in the gas phase yields gaseous C 1–2 hydrocarbons and RSiH 3 compounds (R=H, CH 3 , C 2 H 5 and C 2 H 3 ), and it represents a convenient process for chemical vapour deposition of thin films composed of Si/C/H, Si/C and Si components.

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Article information

DOI
https://doi.org/10.1039/A606524D
Article type
Paper

J. Mater. Chem., 1997,7, 637-640

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Si/C phases from the IR laser-induced decomposition of 1,4-disilabutane

Elvira A. Volnina, J. Kupčík, Z. Bastl, J. Šubrt, Leonid E. Gusel’nikov and J. Pola, J. Mater. Chem., 1997, 7, 637 DOI: 10.1039/A606524D

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