SiO2/Si(100)model support with AES and XPS in combination with MLCFA

Abstract

Model supports consisting of a thin layer of SiO₂ on a silicon single crystal offer tremendous advantages for the study of heterogeneous catalysts. Using model supports, the use of angle-resolved and depth profiling X-ray photoelectron spectroscopy has now become meaningful. The Varimax Promax transformation (VPT) technique for maximum likelihood common factor analysis (MLCFA) has been proposed as an alternative method to the traditional transformations. The so-called VPT technique makes no use of spectral reference libraries. Both MLCFA and VPT are incorporated in a factor analysis software package which has been applied, in combination with XPS and AES, to the study of thin layers of SiO₂ on Si(100).