Preparation and characterization of Au-dispersed TiO2 thin films by a liquid-phase deposition method

Abstract

Au-dispersed TiO₂(anatase) thin films have been prepared by a novel method, liquid-phase deposition (LPD). The deposited films were characterized by XRD, XPS, TEM and UV–VIS absorption spectroscopy. The results showed that the titanium oxide thin film containing Au^III ions was formed from a mixed solution of ammonium hexafluorotitanate, boric acid and tetrachloroauric acid. Heat treatment above 200 °C of the deposited film under flowing air produced dispersed Au metal particles, accompanied by the crystallization of titanium oxide as a matrix. The mean particle size of the dispersed Au particles was ca. 15 nm. The optical absorption band due to the surface plasmon resonance of the dispersed Au particles shifted toward longer wavelengths with increasing heat-treatment temperature.