Chemical vapour deposition of electrochromic tungsten oxide films employing volatile tungsten(VI) oxo alkoxide/β-diketonate complexes
Abstract
Tungsten(VI) oxo alkoxides and tungsten(VI) oxo alkoxide/β-diketonate complexes are volatile precursors for the low-pressure chemical vapour deposition of tungsten oxide electrochromic films, which are characterized by SEM, XPS, XRD and cyclic voltammetry.