Computer simulation of enclosed inductively coupled plasma discharges. Part 1. Monatomic gases

Abstract

An enclosed inductively coupled plasma (EICP) discharge is simulated with argon and neon, and the thermodynamic and fluid flow fields are calculated for a sealed discharge. The influence of discharge container geometry and generator power and frequency are examined. Similarities between the model discharges reflect the thermodynamic and transport properties of argon and neon. Neon model discharges are found to be more stable than their argon counterparts. They exhibit higher maximum temperatures and lower wall temperatures than argon at similar operating frequencies. The velocities in the neon discharge simulation are higher than in an equivalent argon discharge.