Studies of jet configurations for jet-enhanced sputtering devices

Abstract

A modified gas, jet-enhanced glow discharge device for atomic spectrometry has been developed. Three types of jet configurations were constructed and investigated: six-jet, conejet and cylinder-jet. The discharge current, pressure and gas flow rate were studied for optimum discharge conditions. The sample mass loss for a Cu sample increases three-fold using a six-jet and cone-jet configuration, with a gas flow rate increase of 0–200 sccm. However, the sample mass loss increases from 0.8 to 1.5 mg as the gas flow rate increases from 0 to 200 sccm with a cylinder-jet configuration. The maximum absorbance was obtained with a cone-jet configuration at 1.7 mbar, 150 sccm and 30 mA discharge current.