Chemomechanical polishing of lithium niobate using alkaline silica sol and alkaline silica sol modified with hydrogendifluoride anion
Abstract
Lithium niobate undergoes a slow reaction with anhydrous HF at room temperature to give LiNbOF4, which is readily hydrolysed to give Nb2O5 as one product. This sequence of reactions is believed to be responsible for the superior performance of aqueous alkaline silica sol modified by the addition of [HF2]– for the Chemomechanical polishing of LiNbO3 wafers, compared with silica sol alone.