Quantitative analysis of electronic-grade anhydrous hydrogen chloride by sealed inductively coupled plasma atomic emission spectroscopy

Abstract

Anhydrous hydrogen chloride at concentrations of up to 100% has been introduced into a sealed inductively coupled plasma system for quantitative spectrochemical analysis. Vapour-phase sampling of monobutyltin trichloride was developed to calibrate tin and carbon. The addition of chlorine as a modifier gas was required in a ratio of 1:1 to maintain stable and reproducible emission signals. Under flowing conditions detection limits for tin and carbon were 49 and 271 (ng g^–1), respectively, in a 16% v/v HCl–Cl₂ argon plasma. Impurities identified qualitatively included Al, C, Ca, Cr, Fe, Ni and Sn. In addition, the bulk temperature of the plasma was determined to be 10 500 ± 1500 K.