Growth of thin dense gas-tight (Tb,Y)-ZrO2 films by electrochemical vapour deposition
Abstract
Electrochemical vapour deposition has been applied to depositing thin, dense, gas-tight terbia- and yttria-stabilized zirconia films on porous ceramics using metal chlorides as precursors. (Tb,Y)-ZrO2 solid solutions have a fluorite-type structure and have a high mixed conductivity and oxygen semipermeability.