Processes for both optical and autocatalytic chemical amplification of a latent image have been realized in the polymer donor poly(hydroxyaminoester) in the presence of the electron acceptor hexabromodimethylsulfone and the chemical sensitizes dimethylaminobenzaldehyde. This resulted in a negative photoresist with a sensitivity as high as 0.2–0.5 mJ cm–2.
A. V. Vannikov, A. D. Grishina, M. G. Tedoradze, L. I. Kostenko, A. V. Anikeev and I. V. Koblik, J. Mater. Chem., 1993, 3, 761 DOI: 10.1039/JM9930300761
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