Chemical vapour deposition of reactive organogermanium films by laser-induced decomposition of tetramethoxygermane

Abstract

Laser-induced multiphoton and SF₆-photosensitised decomposition of tetramethoxygermane has been used for chemical vapour deposition of reactive organooxogermanium polymers, which were characterised by IR, VIS, and UV spectra and ESCA and TEM techniques. The properties of the deposited layers differed depending on the mode of tetramethoxygermane decomposition. The films were reactive towards the ambient atmosphere; this is discussed in terms of the reaction of CH₃OGe groups with air moisture.