Determination of trace amounts of water in high-purity silane, arsine and phosphine by gas chromatography

Abstract

A method for the determination of trace amounts of water in high-purity silane, arsine and phosphine by gas chromatography (GC) is described. Samples are first passed through a transfer tube packed with calcium carbide to convert the water into acetylene, then through a liquid film packed column to eliminate the main hydride constituent. The analysis is performed by GC with flame-ionization detection. This method avoids contamination of the GC system.