Gas phase impurities in silane determined by gas chromatography-mass spectrometry

Abstract

The impurities in silane have been determined using gas chromatography-mass spectrometry (GC-MS). The mass spectra of the main impurities have been obtained together with their detection limits. Quantitative evaluations of the impurities could be made without the use of an external standard. The performance of GC-MS in the determination of dopant-type impurities was demonstrated by means of single-ion monitoring during the elution of the molecular species of interest.