Issue 8, 1988

Observation of sputtering at atmospheric pressure

Abstract

A radiofrequency discharge, operating in helium at a power level in the range 5–30 W, is found to provide a stable sputtering medium. An initial characterisation of the device as an emission source and as an absorption cell has been made.

Article information

Article type
Paper

J. Anal. At. Spectrom., 1988,3, 1137-1139

Observation of sputtering at atmospheric pressure

R. Stephens, J. Anal. At. Spectrom., 1988, 3, 1137 DOI: 10.1039/JA9880301137

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