Issue 0, 1975

Application of classical oscillator functions to the simultaneous determination of substrate optical constants and film thickness from ellipsometric measurements

Abstract

A method is described whereby substrate optical constants, film refractive index and film thickness are simultaneously obtained from one set of ellipsometric measurements at various wavelengths of light performed on a film-covered metal surface. In this method the metal substrate's optical constants are represented by one of three functional forms: a modified free electron function, a free electron plus classical oscillator, and a sum of classical oscillators. Values of metal optical constants, film refractive index and film thickness so obtained agree well with independent determinations of these quantities.

Article information

Article type
Paper

J. Chem. Soc., Faraday Trans. 2, 1975,71, 387-392

Application of classical oscillator functions to the simultaneous determination of substrate optical constants and film thickness from ellipsometric measurements

M. Moskovits and P. J. Ostrowski, J. Chem. Soc., Faraday Trans. 2, 1975, 71, 387 DOI: 10.1039/F29757100387

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Spotlight

Advertisements