The effect of both ozoniser-type silent electric discharges and microwave discharges on silane, ammonia, and silane–ammonia mixtures is discussed. Silicon nitride films are formed in the microwave discharge of the latter.
J. E. Drake and N. P. C. Westwood, J. Chem. Soc. A, 1971, 2587 DOI: 10.1039/J19710002587
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