Atomic layer deposition of platinum clusters on titania nanoparticles at atmospheric pressure

Abstract

We report the fabrication of platinum nanoclusters with a narrow size distribution on TiO₂ nanoparticles using atomic layer deposition. With MeCpPtMe₃ and ozone as reactants, the deposition can be carried out at a relatively low temperature of 250 °C. Our approach of working with suspended nanoparticles at atmospheric pressure gives precise control of the material properties, high efficiency of the use of the platinum precursor, and the possibility for large-scale production of the nanostructured particles.