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The AlN lattice-polarity inversion in a high-temperature-annealed c-oriented AlN/sapphire originated from the diffusion of Al and O atoms from sapphire

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Comprehensive study of crystalline AlN/sapphire templates after high-temperature annealing with various sputtering conditions

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Homoepitaxy Growth of High‐Quality AlN Film on MOCVD AlN Template by Hydride Vapor Phase Epitaxy

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Physica Status Solidi (b), 2023, 260
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Influence of sapphire substrate miscut on the surface morphology and microstructure of AlN films grown by HVPE

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Recent Advances in Fabricating Wurtzite AlN Film on (0001)-Plane Sapphire Substrate

Hualong Wu, Kang Zhang, Chenguang He, Longfei He, Qiao Wang, Wei Zhao and Zhitao Chen

Crystals, 2021, 12, 38
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Introduction of dislocation filtering with different ammonia flows in low-temperature grown AlN (< 1200 °C)

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Thermally annealed wafer-scale h-BN films grown on sapphire substrate by molecular beam epitaxy

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Applied Physics Letters, 2020, 116
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High temperature lattice structure evolution of C-axis preferred orientation AlN thin films and its application in temperature measurement

Ling Dong, Yang Li, Jingwen Lv, Hongchuan Jiang, Xiaohui Zhao and Wanli Zhang

Ceramics International, 2023, 49, 607
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Surface improvement of high temperature annealed Si-doped AlGaN layers

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Materials Science in Semiconductor Processing, 2025, 200, 109949
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High-temperature annealing induced evolution of strain in AlN epitaxial films grown on sapphire substrates

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Applied Physics Letters, 2019, 114
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AlxGa1-xN microring resonators with Composition-Driven tunability for High-Q photonics

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The interplay of process parameters and influence on the AlN films on sapphire fabricated by DC magnetron sputtering and annealing

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Controlled bunching approach for achieving high efficiency active region in AlGaN-based deep ultraviolet light-emitting devices with dual-band emission

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Applied Physics Letters, 2020, 116
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Formation of voids and their role in the recovery of sputtered AlN during high-temperature annealing

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Journal of Applied Physics, 2022, 131
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Elimination of spiral hillocks in AlGaN grown on high-temperature annealed AlN templates by adopting an AlN/AlGaN stress modulation multilayer

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Applied Physics Letters, 2024, 124
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Direct demonstration of carrier distribution and recombination within step-bunched UV-LEDs

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Synthesis of Aluminium Nitride-Based Coatings on Mild Steel Substrates Utilising an Integrated Laser/Sol–Gel Method

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Photonics, 2024, 11, 382
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Carrier Velocity Modulation by Asymmetrical Concave Quantum Barriers to Improve the Performance of AlGaN-Based Deep Ultraviolet Light Emitting Diodes

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Efficient Deep Ultraviolet Emission from Self-Organized AlGaN Quantum Wire Array Grown On Ultrathin Step-bunched AlN Templates

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Crystal Growth & Design, 2024, 24, 1551
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Greatly enhanced performance of AlGaN-based deep ultraviolet light emitting diodes by introducing a polarization modulated electron blocking layer

J. Lang, F. J. Xu, W. K. Ge, B. Y. Liu, N. Zhang, Y. H. Sun, J. M. Wang, M. X. Wang, N. Xie, X. Z. Fang, X. N. Kang, Z. X. Qin, X. L. Yang, X. Q. Wang and B. Shen

Opt. Express, 2019, 27, A1458
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Improved Crystallinity of Annealed 0002 AlN Films on Sapphire Substrate

Bruno Comis Bersch, Tomàs Caminal Ros, Vegard Tollefsen, Erik Andrew Johannessen and Agne Johannessen

Materials, 2023, 16, 2319
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Germicidal ultraviolet LEDs: a review of applications and semiconductor technologies

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Semicond. Sci. Technol., 2021, 36, 123001
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Effect of Gas Annealing on the Electrical Properties of Ni/AlN/SiC

Dong-Hyeon Kim, Michael A. Schweitz and Sang-Mo Koo

Micromachines, 2021, 12, 283
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High‐Temperature Annealing of AlGaN

Sylvia Hagedorn, Taimoor Khan, Carsten Netzel, Carsten Hartmann, Sebastian Walde and Markus Weyers

Physica Status Solidi (a), 2020, 217
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Thermal annealing of AlN films for piezoelectric applications

Etienne Herth, Dame Fall, Jean-Yves Rauch, Virginie Mourtalier and Grégory Guisbiers

J Mater Sci: Mater Electron, 2020, 31, 4473
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Strain-free ultrathin AlN epilayers grown directly on sapphire by high-temperature molecular beam epitaxy

David Arto Laleyan, Natalia Fernández-Delgado, Eric T. Reid, Ping Wang, Ayush Pandey, Gianluigi A. Botton and Zetian Mi

Applied Physics Letters, 2020, 116
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Preparation of AlN film grown on sputter-deposited and annealed AlN buffer layer via HVPE*

Di-Di Li, Jing-Jing Chen, Xu-Jun Su, Jun Huang, Mu-Tong Niu, Jin-Tong Xu and Ke Xu

Chinese Phys. B, 2021, 30, 036801
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High-temperature annealing effects on epitaxial TiN films on 4H-SiC

Hsueh-I Chen, Ching-Ho Chen, Yi Chou, Jhih-Syuan Chen, Yu-Fu Hsu, Chih-Wei Kuo, Cheng-Jung Ko, Li Chang and Chun-Hua Chen

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Enhancing the Crystal Quality of AlN Thin Films on Patterned Sapphire Substrates Using Temperature-Modulated Growth in the PALE Technique

F. K. Özbakir and İ. Altuntaş

Arab J Sci Eng, 2026, 51, 2127
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