Issue 5, 2022

Deep X-ray lithography on “sol–gel” processed noble metal mesoarchitectured films

Abstract

Noble metal coordination xerogel films (mesostructured with block-copolymers) exhibit solubility switching with increasing X-ray irradiation. Different from other sol–gel systems, these are attributed to film deconstruction under irradiation. These materials can be used as recyclable negative tone resists for deep X-ray lithography that can be further converted into metallic nanoarchitectured films.

Graphical abstract: Deep X-ray lithography on “sol–gel” processed noble metal mesoarchitectured films

Supplementary files

Article information

Article type
Communication
Submitted
10 noy 2021
Accepted
19 dek 2021
First published
21 dek 2021

Nanoscale, 2022,14, 1706-1712

Deep X-ray lithography on “sol–gel” processed noble metal mesoarchitectured films

M. Gayrard, B. Marmiroli, F. Chancerel, P. Decorse, H. Amenitsch, J. Peron, A. Cattoni and M. Faustini, Nanoscale, 2022, 14, 1706 DOI: 10.1039/D1NR07455E

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