Issue 21, 2021

Facile fabrication of flexible concave microlens arrays with a well-controlled curvature

Abstract

We report the facile fabrication of flexible concave microlens arrays (MLAs) with a well-controlled curvature using a leaky dielectric (LD) via the electrowetting-on-dielectrics (EWOD) phenomenon. MLAs with a larger curvature (up to 0.46 μm−1) are fabricated using the LD compared with the perfect dielectric (PD) (∼0.40 μm−1). The improved curvature is attributed to the better electrowettability (i.e., the smaller contact angle) of the LD on the inner-wall of the microhole arrays of the Si-template. Moreover, the curvature of the MLAs can be well controlled by the applied external voltage or the spin rate. Finally, the as-fabricated MLAs show a favorable reflective focusing performance, refractive imaging performance and scattering performance for potential applications in miniaturized and high-performance flexible optical micro-devices.

Graphical abstract: Facile fabrication of flexible concave microlens arrays with a well-controlled curvature

Article information

Article type
Research Article
Submitted
01 apr 2021
Accepted
20 iyl 2021
First published
30 iyl 2021

Mater. Chem. Front., 2021,5, 7759-7766

Facile fabrication of flexible concave microlens arrays with a well-controlled curvature

G. Lv, H. Tian, J. Shao, X. Feng, L. Meng, Z. Ren and D. Yu, Mater. Chem. Front., 2021, 5, 7759 DOI: 10.1039/D1QM00519G

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