Issue 23, 2021

A handy reversible bonding technology and its application on fabrication of an on-chip liquid metal micro-thermocouple

Abstract

We report a novel reversible bonding technique for liquid metal (LM) microelectrode fabrication in this study. This technique greatly simplifies the process of LM micro-electrode fabrication and can be used to achieve the rapid fabrication of LM blind-end electrodes. Three kinds of treatments, including heat treatment, plasma treatment and heat/plasma treatment, were tested for bonding strength. The experimental results showed that the heat/plasma treatment has the strongest bonding strength. All the three treatments can be completely released by simple water treatment. This handy fabrication method can help to integrate micro-liquid metal electrodes vertically in a microchannel. At the end of this work, this fabrication method was used to integrate liquid metal thermocouples in a microchannel, which greatly shortened the fabrication time and lowered the cost compared with traditional deposition or sputtering methods.

Graphical abstract: A handy reversible bonding technology and its application on fabrication of an on-chip liquid metal micro-thermocouple

Article information

Article type
Paper
Submitted
16 আগষ্ট 2021
Accepted
11 অক্টো 2021
First published
22 অক্টো 2021

Lab Chip, 2021,21, 4566-4573

A handy reversible bonding technology and its application on fabrication of an on-chip liquid metal micro-thermocouple

J. Hong, J. Gong, Q. Li, Z. Deng and L. Gui, Lab Chip, 2021, 21, 4566 DOI: 10.1039/D1LC00726B

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements