Issue 3, 2021

Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

Abstract

The past few decades have witnessed growing research interest in developing powerful nanofabrication technologies for three-dimensional (3D) structures and devices to achieve nano-scale and nano-precision manufacturing. Among the various fabrication techniques, focused ion beam (FIB) nanofabrication has been established as a well-suited and promising technique in nearly all fields of nanotechnology for the fabrication of 3D nanostructures and devices because of increasing demands from industry and research. In this article, a series of FIB nanofabrication factors related to the fabrication of 3D nanostructures and devices, including mechanisms, instruments, processes, and typical applications of FIB nanofabrication, are systematically summarized and analyzed in detail. Additionally, current challenges and future development trends of FIB nanofabrication in this field are also given. This work intends to provide guidance for practitioners, researchers, or engineers who wish to learn more about the FIB nanofabrication technology that is driving the revolution in 3D nanostructures and devices.

Graphical abstract: Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

Article information

Article type
Minireview
Submitted
20 Dit 2020
Accepted
25 Xim 2020
First published
10 Kax 2020

Nanoscale, 2021,13, 1529-1565

Recent advances in focused ion beam nanofabrication for nanostructures and devices: fundamentals and applications

P. Li, S. Chen, H. Dai, Z. Yang, Z. Chen, Y. Wang, Y. Chen, W. Peng, W. Shan and H. Duan, Nanoscale, 2021, 13, 1529 DOI: 10.1039/D0NR07539F

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements