Issue 5, 2017

Depth profile analysis with glow discharge spectrometry

Abstract

Nowadays, glow discharge-optical emission spectrometry (GD-OES) and glow discharge-mass spectrometry (GD-MS) can be considered as two well established techniques for depth profiling, offering practical interest to assist the synthesis optimization process and the quality control of materials coated with thin or thick layers. In this article, actual commercial instrumentation and depth profile quantification methods with these two analytical tools are first briefly reviewed. Afterwards particular attention is paid to the description of recent applications which show the almost unique capabilities of GD-OES and GD-MS for fast elemental quantitative depth profiling of films going from an atomic layer up to more than a hundred micrometres. Moreover, some illustrative applications are shown for the characterization of organic films resorting to GD-OES and GD-MS.

Graphical abstract: Depth profile analysis with glow discharge spectrometry

Article information

Article type
Critical Review
Submitted
10 Nah 2017
Accepted
24 Cig 2017
First published
29 Cig 2017

J. Anal. At. Spectrom., 2017,32, 920-930

Depth profile analysis with glow discharge spectrometry

L. Lobo, B. Fernández and R. Pereiro, J. Anal. At. Spectrom., 2017, 32, 920 DOI: 10.1039/C7JA00055C

To request permission to reproduce material from this article, please go to the Copyright Clearance Center request page.

If you are an author contributing to an RSC publication, you do not need to request permission provided correct acknowledgement is given.

If you are the author of this article, you do not need to request permission to reproduce figures and diagrams provided correct acknowledgement is given. If you want to reproduce the whole article in a third-party publication (excluding your thesis/dissertation for which permission is not required) please go to the Copyright Clearance Center request page.

Read more about how to correctly acknowledge RSC content.

Social activity

Spotlight

Advertisements