An aminopyridinato Mn(ii) compound as a novel CVD precursor for manganese-containing films

Abstract

The novel aminopyridinato Mn(II) compound has been synthesized and characterized by elemental analysis and X-ray diffraction. It was easily obtained through a conventional salt-elimination reaction. Thermal properties, including stability, volatility, transport behavior and vapor pressure, were evaluated by thermogravimetric analysis (TGA) to confirm that it is suitable for the CVD procedure. Deposition was accomplished in a hot-wall CVD reactor, verifying its ability to act as a CVD precursor for the fabrication of manganese containing films.