Partially fluorinated oxo-alkoxide tungsten(vi) complexes as precursors for deposition of WOx nanomaterials

Abstract

The partially fluorinated oxo-alkoxide tungsten(VI) complexes WO(OR)₄ [4; R = C(CH₃)₂CF₃, 5; R = C(CH₃)(CF₃)₂] have been synthesized as precursors for chemical vapour deposition (CVD) of WO_x nanocrystalline material. Complexes 4 and 5 were prepared by salt metathesis between sodium salts of the fluoroalkoxides and WOCl₄. Crystallographic structure analysis allows comparison of the bonding in 4 and 5 as the fluorine content of the fluoroalkoxide ligands is varied. Screening of 5 as a CVD precursor by mass spectrometry and thermogravimetric analysis was followed by deposition of WO_x nanorods.