Electrochemical mechanical micromachining based on confined etchant layer technique
Abstract
The confined etchant layer technique (CELT) has been proved an effective electrochemical microfabrication method since its first publication at Faraday Discussions in 1992. Recently, we have developed CELT as an electrochemical mechanical micromachining (ECMM) method by replacing the cutting tool used in conventional mechanical machining with an electrode, which can perform lathing, planing and polishing. Through the coupling between the electrochemically induced chemical
- This article is part of the themed collection: Electroanalysis at the Nanoscale